Abstract: As the world enters the era of IoT, the sensor industry has ushered in explosive growth. MEMS sensors gradually become the mainstream due to their advantages of small size, high sensitivity and strong reliability. At present, China has made great progress in MEMS industry such as MEMS sensor design, manufacturing, packaging, and testing. However, there are still many shortcomings. According to the current status of China's MEMS industrial development, we recommend that China focus on key technology breakthroughs, industry coordinated development, and releasing encouragement policies to further promote the overall improvement of China's MEMS sensor industry.

Key words: MEMS, sensor, industry chain